| abstract |
The present invention provides a salt represented by the formula (I): n nwherein X represents an n-valent connecting group, Y 1 and Y 2 each independently represent a fluorine atom or a C1-C6 perfluoroalkyl group, n represents 2 or 3, and A + represents an organic counter ion.n n The present invention further provides a chemically amplified resist composition comprising the salt represented by the above-mentioned formula (I). |