| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_136ba68ea9174170e8362b68e294ac52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a30ab3a389fcab88bddd13c33c4e763b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_99e0ccc0bcbf8bb7907529488f4267d4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D211-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D207-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D233-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D307-77
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D327-08 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D207-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D307-77
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D211-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D233-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D327-08 |
| filingDate |
2011-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b802670226560c6536bfab52444d999f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b8bc1e37fa77960bb2014b9c8a8a7a4d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_114c9c747d7c97217973575f14acf290 |
| publicationDate |
2016-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9405187-B2 |
| titleOfInvention |
Salt, acid generator and resist composition |
| abstract |
The present invention is a salt represented by the formula (I) n nwherein R 1 and R 2 independently represent a fluorine atom or a C 1 to C 6 perfluoroalkyl group; L 1 represents a C 1 to C 17 divalent saturated hydrocarbon group, a —CH 2 — contained in the saturated hydrocarbon group may be replaced by —O— or —CO—; ring W 1 represents a C 2 to C 36 heterocycle; R 3 represents a hydrogen atom or a C 1 to C 12 hydrocarbon group, a —CH 2 — contained in the hydrocarbon group may be replaced by —O— or —CO—; R 4 in each occurrence independently represent a C 1 to C 6 hydrocarbon group, a —CH 2 — contained in the hydrocarbon group may be replaced by —O— or —CO—; m represents an integer of 0 to 6; and Z + represents an organic cation. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021223692-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11662662-B2 |
| priorityDate |
2010-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |