| abstract |
A salt represented by the formula (X): n n n n n n n n n n wherein Q 1 and Q 2 each independently represent a fluorine atom etc., L 1 and L 2 independently each represent a C1-C17 divalent saturated hydrocarbon group, ring W 1 represents a C3-C36 saturated hydrocarbon ring, R 2 is independently in each occurrence a hydroxyl group etc., s represents an integer of 0 to 2, Z + represents an organic counter ion, and W 10 represents a group represented by the formula (X-1): n n n n n n n n n n wherein ring W 2 represents a C4-C36 saturated hydrocarbon ring in which one or more —CH 2 — can be replaced by —O— or —CO—, with the proviso that at least one —CH 2 — in the C4-C36 saturated hydrocarbon ring is replaced by —CO—, R 3 is independently in each occurrence a C1-C6 alkyl group etc., and t represents an integer of 0 to 2, or a group represented by the formula (X-2): n n n n n n n n n n wherein ring W 3 represents a C3-C36 saturated hydrocarbon ring, R 4 is independently in each occurrence a hydroxyl group etc., R 5 is independently in each occurrence a C1-C6 alkyl group etc., v represents an integer of 1 to 3, and w represents an integer of 0 to 2. |