Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C2603-74 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C321-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C381-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-17 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C69-74 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-17 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C211-45 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C381-12 |
filingDate |
2012-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fcb142bcea5ae883356b016617eda596 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a144f3526dc1d67cb5c2c69f8714bf36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_670712e4c98df4c464bc1ac57747e207 |
publicationDate |
2013-03-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
JP-2013053142-A |
titleOfInvention |
Salt, resist composition and method for producing resist pattern |
abstract |
Provided is a salt for adjusting a resist composition capable of obtaining a rectangular pattern without leaving a mask correction pattern when a mask correction technique is used. A salt represented by formula (I). [Wherein, Q 1 and Q 2 each represent a fluorine atom or a C 1-6 perfluoroalkyl group. L 1 represents a trivalent aliphatic saturated hydrocarbon group having 1 to 20 carbon atoms or the like. -OH in L 1 -OH is bonded to a carbon atom of a chain portion of the trivalent aliphatic saturated hydrocarbon group having 1 to 20 carbon atoms represented by L 1 . W represents a monovalent alicyclic hydrocarbon group having 3 to 36 carbon atoms or the like. R 2 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. Z + represents an organic cation. ] [Selection figure] None |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160072805-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102500716-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012224615-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016113454-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7159569-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7332347-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018145179-A |
priorityDate |
2011-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |