patent/US-6410463-B1

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6410463-B1

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f50f95c17e4934fb9f9810574cdf87aa
classificationCPCAdditional	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-12044
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3122 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02216 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-62 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D4-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3121 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-296 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-401
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-29 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D4-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D7-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40
filingDate	2000-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate	2002-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_55fb12f266133a1d81bc8ff966564662
publicationDate	2002-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-6410463-B1
titleOfInvention	Method for forming film with low dielectric constant on semiconductor substrate
abstract	In a method for forming in a reactor a film having a low relative dielectric constant on a semiconductor substrate by plasma reaction, the improvement can be achieved by lengthening a residence time, Rt, of a reaction gas in the reactor, wherein 100 msec<=Rt. The film includes insulation films and mask films.
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D981973-S http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D980814-S http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10755922-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11361990-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6855629-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6806207-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003139035-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11056567-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D990534-S http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D990441-S http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10829852-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11674220-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009281344-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10832903-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7183195-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004039219-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11342216-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7323407-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11705333-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007042610-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004234688-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8137764-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7622369-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10867788-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007134435-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003186561-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D931978-S http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11417545-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004102006-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D930782-S http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D935572-S http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7060330-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10804098-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D940837-S http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D947913-S http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D944946-S http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11688603-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D948463-S http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11430640-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003224622-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6825134-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007275569-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D949319-S http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10714335-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D965044-S http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004214446-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11430674-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D975665-S http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D965524-S http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11393690-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11694892-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10818758-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11695054-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11396702-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10914004-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7758697-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11398382-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003064154-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7713346-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6660656-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11401605-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6660663-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8153833-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11217444-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7312128-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11725280-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002168849-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11355338-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11411088-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7960256-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004038545-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11227782-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11387120-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7745328-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6890869-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009298257-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7064088-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7056560-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11735422-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11735414-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11735445-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012199808-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002136910-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11473195-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10685834-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7749563-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005042858-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003119336-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7030041-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6838393-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010018460-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11557474-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9443736-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005042889-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11437241-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11718913-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11251035-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11251040-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008076266-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003162408-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11069510-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11205585-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7297376-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004099281-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11725277-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11447864-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7645339-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11390946-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9783558-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11447861-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6770556-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11551912-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10858737-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11551925-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005080286-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8029620-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11453946-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007240632-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10865475-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11492703-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11270899-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10867786-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11495459-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004138489-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11230766-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11232963-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6797643-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7560352-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9102693-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11233133-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11499226-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10872771-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11499222-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7456488-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11501956-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7572715-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7611976-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11501973-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006115933-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11501968-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10844484-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006115934-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11387106-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11274369-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007066023-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10844486-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11242598-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10847366-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11244825-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10847371-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7887883-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11251068-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11482418-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11482533-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7049249-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10851456-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004096582-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11295980-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11296189-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010136789-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004224089-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11562901-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010285663-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7521365-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10741385-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11488854-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11488819-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7342295-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10950432-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10886123-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11306395-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11286558-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7786320-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11749562-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010221914-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10731249-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11286562-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11410851-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006216876-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7540920-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11289326-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005191846-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11476109-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003116421-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006110931-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7863203-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10784102-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7354873-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7560377-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005161763-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10883175-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006246737-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006260538-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004198070-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7588980-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10892156-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11742189-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11339476-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006134897-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11742198-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006166414-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10896820-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10787741-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11469098-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11282698-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11345999-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11746414-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10941490-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10943771-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6927178-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8501594-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11767589-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11769670-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6759327-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11769682-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003194495-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11530876-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11530483-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7781605-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8053375-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11532757-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7910765-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11776846-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7423166-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6784123-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007082451-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003232495-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010317177-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7439318-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7517775-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011136343-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10923344-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11139191-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004009676-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8586456-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7151053-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10928731-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004241463-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11227789-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003162410-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6531398-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10934619-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11094546-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7732305-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7446217-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8541318-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11031242-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006286774-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11515188-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11515187-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009084288-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006286776-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7682940-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11521851-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11482412-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006258176-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010261925-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7125813-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005080285-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005214457-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7579496-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003219540-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10811256-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11049751-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11001925-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7718553-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11004977-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11114294-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7601860-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007207596-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8093154-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11222772-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10910262-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6596655-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6930061-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11015245-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11424119-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003162034-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6932092-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8236097-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11018047-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11018002-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005130404-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6716770-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003162412-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11022879-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11581186-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11024523-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11781221-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005130440-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8242032-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11581220-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8637396-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11781243-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007259112-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006006140-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11414760-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007004204-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8387557-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11107676-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011165762-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11081345-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003143867-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008022924-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7531679-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10714350-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008026549-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6593247-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11390950-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7781352-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11087997-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10714385-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8765233-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011183528-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11088002-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7157384-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10720331-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004156987-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004082193-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003206337-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11572620-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008305648-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6869896-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10975470-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7256139-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11053591-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004067308-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8445389-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009053902-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11127589-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7132338-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11056344-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11315794-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003211244-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7189571-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7737007-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006046479-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010068894-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11605528-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9018108-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006063376-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1918415-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8802882-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11610774-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7422774-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004152338-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006169669-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7166528-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11610775-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7674337-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008160174-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6890850-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11587814-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11587821-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11587815-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7465659-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11127617-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005233555-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11594600-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010174103-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11594450-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6573196-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005233576-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7078302-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7074489-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11139308-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11649546-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11626316-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11094582-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11626308-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6897163-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10847365-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004132291-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7648927-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11658030-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11101370-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11629407-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6759344-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11658029-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11629406-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7651955-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11658035-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7459404-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005079691-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10734223-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10734497-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11664245-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7091137-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11664199-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008048148-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007155931-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7235492-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011230036-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11639548-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6730593-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11637011-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11114283-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11639811-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11164955-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005153073-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7108771-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11637014-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7582575-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11168395-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6699784-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7105460-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006086850-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11615970-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010314590-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11615980-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11171025-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11643724-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11443926-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004082199-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11644758-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8564031-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11646197-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11646184-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11646205-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D913980-S http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11646204-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011042789-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11676812-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D922229-S http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10797133-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11374112-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11680839-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11682572-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010143609-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005037153-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11378337-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11527400-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11527403-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6852650-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10767789-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10770336-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004038514-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11685991-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005277302-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005186765-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8492284-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7319068-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6881683-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006234488-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11664267-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006286763-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11158513-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6936551-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11390945-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7439142-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6828229-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D979506-S http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7651959-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11453943-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-D980813-S http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004253378-A1
priorityDate	1998-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate

Subject

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0826791-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5494712-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H10284486-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6054379-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6068884-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5314724-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5554570-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6051321-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5433786-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5989998-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5380555-A

http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18137
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129928412

Total number of triples: 497.