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publicationDate 2001-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-6277546-B1
titleOfInvention Process for imaging of photoresist
abstract The present invention relates to an improved lithographic imaging process for use in the manufacture of integrated circuits. The process provides protection to the photoresist film from airborne chemical contaminants.
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