| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0233
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0125 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03C1-72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-012
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-008
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-022 |
| filingDate |
1985-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1990-12-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eba83009e54718a68bb3118a36706d93
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ee286f174c1aad3ec90e7751c93a2355
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eca04094bf65e185fb5e45cc625c48ef |
| publicationDate |
1990-12-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-4980264-A |
| titleOfInvention |
Photoresist compositions of controlled dissolution rate in alkaline developers |
| abstract |
A photoresist composition is disclosed which is a mixture of a photoactive compound and an alkali soluble resin binder comprises of an unsaturated dicarboxylic acid esterified polymeric material, such as a phenolic resin containing a plurality of acid esterifiable groups esterified with an unsaturated dicarboxylic acid anhydride having the formula ##STR1## wherein R 1 and R 2 are independently selected from hydrogen and alkyl groups containing 1 to 3 carbon atoms, R 3 and R 4 are alkylene groups containing 1 to 3 carbon atoms and x and y are either 0 or 1. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6905555-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003190818-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003166750-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003118947-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6613157-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6277546-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6602351-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107346095-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5561194-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6562146-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5023164-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5208138-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107346095-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5492793-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6641678-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6596093-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5182184-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5212043-A |
| priorityDate |
1985-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |