| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0236 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03C1-72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03C1-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G8-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G8-00 |
| filingDate |
1984-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1986-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6e418547c1d757b9d262b20ca91078c0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2f1f9fb92a632ad6aa8e43c1dbcabb5f |
| publicationDate |
1986-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-4564575-A |
| titleOfInvention |
Tailoring of novolak and diazoquinone positive resists by acylation of novolak |
| abstract |
Reduction of the alkaline developer solubility of novolak-diazoquinone positive resists by acylation of phenolic hydroxyl groups of the novolak resin. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108368214-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108368214-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011254140-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5985507-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4871645-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009214979-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4980264-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4681923-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5731386-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5342727-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5006443-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5023164-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5208138-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9502254-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4927956-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5541263-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5162510-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5035976-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5827634-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5763536-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5652081-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5182184-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8815754-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4876324-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5158854-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-19980087477-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5707782-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5023311-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5264319-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5700624-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8034529-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4902785-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5514520-A |
| priorityDate |
1984-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |