| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e415f6f1eeb8706d299ea086326248bf |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F8-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F8-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F8-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F8-00 |
| filingDate |
1995-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1998-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bc32b3b6d76da442d06dbe46d471bf62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4b035b50f2fc269b1911b9539bad6b60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e6342379f267837e4951da7476d052b4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_12e54befea21c905c0a5610502e28ff7 |
| publicationDate |
1998-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-5731386-A |
| titleOfInvention |
Polymer for positive acid catalyzed resists |
| abstract |
The invention comprises a polymer formulated for an acid hardened resist system. The polymer is one having acid labile blocking groups and inert blocking groups. The photoresist comprises the polymer and a photoacid generator. The inclusion of inert blocking groups on the resin improves shelf life without deleteriously affecting photolithographic properties of the resist. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6033828-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010119972-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003129547-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8088548-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011076626-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8455176-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6844131-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005214674-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006199103-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8039202-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008038666-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009226107-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7824837-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008090184-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7070914-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8632948-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009104559-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8606025-B2 |
| priorityDate |
1995-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |