http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5164278-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-119
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-115
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-029
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
filingDate 1990-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 1992-11-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_063676cccca9b1a9fd589bd319b583fd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_77959e72b17fadaeab58442930357df9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd23b1d95092db651b23ef43cae1fe47
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d3ad8f53dc4f4dddedbbc0585544db85
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_749a3e0bea8f25a5d7432ec453d93c96
publicationDate 1992-11-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-5164278-A
titleOfInvention Speed enhancers for acid sensitized resists
abstract Acid sensitized photoresists with enhanced photospeed are provided. The photoresist compositions include a polymer binder and/or a polymerizable compound and an acid sensitive group which enables patterning of the resist composition, and acid generating photoinitiator, and an hydroxy aromatic compound which enhances the speed of the resist composition under imaging radiation.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5856069-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-19990044985-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010021843-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/AU-2017382163-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004076905-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004242818-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9410608-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5952149-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5928837-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6300035-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5731125-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6277546-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11427656-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8641941-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1143296-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5633409-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1143297-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1143296-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1143297-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003152862-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5849461-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8158338-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7374857-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0747767-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5624785-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0747767-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009155713-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11143961-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6042988-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016363859-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6841334-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6127089-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6171755-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5756262-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8323866-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11213976-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100500750-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6613493-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5492793-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5650262-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5900346-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5879856-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012201969-A1
priorityDate 1990-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4868092-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S6397944-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4442197-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4506003-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4678737-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4994346-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4311782-A
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457380126
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129753626
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128623360
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129465587
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127528285
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10665
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID19593658
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415838535
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21951543
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128882435
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID92045633
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419818017
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420158002
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419508556
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559091
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID26255
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23515
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14896
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420928714
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419520532
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419588021
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127380435
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID440967
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID998
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127511886
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450577363
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128048417
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128043512
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6623
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129802177
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419543990
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID54256038
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID70249
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62406
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129262598
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID54704426
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7469
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID785
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128479564
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419658868
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11239
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2758875
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128745302
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID136498
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129327108
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419571081
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2365
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129510783
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID136035303
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21872400
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419477881
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420927836
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11813
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128895531
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID19660
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128394362
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID54175992
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419568772
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426099189
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22114727
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID424621649
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415745680
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127693402
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419557871
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128196702
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419474382
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458394586
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127490147
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13230
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9161
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415744829
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425829127
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414028299
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458397310
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420189581
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6550
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8081
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6327152
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7992
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128473253
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10740
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15143
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127786062
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129925936
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID68490
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID19810340
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420199974
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419557887
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID541483
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128363854
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID138198
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21903821
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419707200
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419479223
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426868047
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129629974
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8227
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11305
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415711389
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128026353
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448674543
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419547026
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID93820
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128450764
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129618461
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11729320
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9606
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID70004
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID19810338
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129099963
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9901290
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID146322
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419546198
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16883
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419558575
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12757
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10976022
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1099
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1057
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18461781
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450231985
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454164723
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419578946
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393641
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6328651
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129326493
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419519445
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421471341
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129257926
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6373
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID53872727
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449279213
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129147477
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID70000
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID19091980
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9016
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426059194
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426098967
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7847
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422729790
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421348734
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421966340
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11318
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID422729789
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129966538
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID138202
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID417194757
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8141
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID182635
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7947
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11390394
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5142394
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129012329
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11041607
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID135942625
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421355596
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129797234
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559376
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419577210
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11587
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10220096
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7929
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128879557
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID786365
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419521351
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129292601
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414262147
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559464
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128769235
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31423
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21901022
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127617750
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127398058
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID61344
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410498332
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID160955
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128808012
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419568798
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419521384
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128126239
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128136372
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419525848
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID53639739
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID421886878
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10290825
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454033071
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID53904876
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128353619
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3868826
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129615224

Total number of triples: 262.