| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-115
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-111
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-109 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-021
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-021
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L33-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L33-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F8-00 |
| filingDate |
1983-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78017c7151f1c0a04ec8ffa33c91e38f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78ebd41b7d878a0149ab3fb979a92d41
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cb0a112c7272be34963ca99f85d92d05 |
| publicationDate |
1990-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
EP-0404206-A2 |
| titleOfInvention |
Resist compositions |
| abstract |
Resists sensitive to UV, electron beam and x-ray radiation with positive or negative tone upon proper choice of a developer are formulated from a polymer having recurrent pendant groups such as tert-butyl ester or tert-butyl carbonates that undergo efficient acidolysis with concomitant changes in polarity (solubility) together with a photoinitiator which generates acid upon radiolysis. A sensitizer component that alters wavelength sensitivity may also be added. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6277546-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5397846-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0596668-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0605089-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7410747-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0596668-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5247096-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1640409-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5492793-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6767687-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0487261-A1 |
| priorityDate |
1982-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |