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publicationDate 2022-07-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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titleOfInvention Oxide semiconductor film and semiconductor device
abstract To provide a novel oxide semiconductor film. The oxide semiconductor film includes In, M, and Zn. The M is Al, Ga, Y, or Sn. In the case where the proportion of In in the oxide semiconductor film is 4, the proportion of M is greater than or equal to 1.5 and less than or equal to 2.5 and the proportion of Zn is greater than or equal to 2 and less than or equal to 4.
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