| abstract |
(57) [Abstract] [Problem] To be excellent in resolution and pattern shape, especially "nano edge roughness" or "film surface roughness". And positive and negative radiation-sensitive resin compositions that do not cause odor. SOLUTION: The positive radiation-sensitive resin composition comprises (A) (A) an acid-dissociable group-containing resin, or (B) an alkali-soluble resin and an alkali-solubility controlling agent, and (B) a compound that generates a carboxylic acid having a boiling point of 150 ° C. or more upon irradiation with radiation, A radiation-sensitive acid generator in combination with a compound capable of generating an acid other than a carboxylic acid upon irradiation with radiation. The negative-type radiation-sensitive resin composition contains (C) an alkali-soluble resin, (D) a crosslinking agent, and the component (B). |