| abstract |
This invention is a radiation sensitive resin composition containing (A) acid dissociable group containing resin and (C) compound represented by General formula (1). <Formula 1> (In Formula 1, Z − represents a monovalent anion represented by Formula 2, and M + represents a monovalent onium cation.) <Formula 2> In Formula 2, R 1 represents a linear or branched alkyl group having 1 to 12 carbon atoms or unsubstituted or substituted with a fluorine atom, or a linear or branched alkoxy group having 1 to 12 carbon atoms, and n represents 1 or 2 Indicates) |