| abstract |
PROBLEM TO BE SOLVED: To provide a cleaning agent for electronic materials which does not substantially contain an alkali metal atom, is excellent in preventing reattachment of fine particles which are refined during cleaning, and enables efficient high-level cleaning. A cleaning agent for electronic materials comprising a quaternary ammonium salt (B) of an organic acid (A), wherein the total content of alkali metal atoms and alkaline earth metal atoms is the weight of the cleaning agent. And a quaternary ammonium carbonate (B) obtained by reaction of a tertiary amine (C) having a pKa of 11 to 40 with dimethyl carbonate. And a quaternary ammonium salt obtained by an anion exchange reaction with the organic acid (A). The weight average molecular weight of the quaternary ammonium salt (B) is preferably 1,000 to 1,000,000. [Selection figure] None |