| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d97cb748898aa080b013f7f35bc8b434 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F2103-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67057
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F2101-20 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F1-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F1-444
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J47-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J41-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F1-62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J39-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F1-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02052
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J47-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C02F1-62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J39-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J41-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C02F1-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C02F1-42 |
| filingDate |
2016-09-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a2bc4a35de85da17d8f3e3c2261d1a79
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8594d16e33588b021d2357cc51410d1e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_60024dfc25b8da03a232569a3b3c2298 |
| publicationDate |
2018-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20180058706-A |
| titleOfInvention |
Metal antifouling agent, metal antifouling film, metal pollution prevention method, and product cleaning method |
| abstract |
The adhesion of the trace metals in the ultra pure water for cleaning the product is reduced to suppress the metal contamination to be cleaned. A metal antifouling agent containing a polymer having an ion exchange group such as polystyrenesulfonic acid having a molecular weight of 100,000 or more. The trace metal in the ultrapure water can be adsorbed to the product by adsorbing the polymer having an ion exchange group by an ion exchange reaction. And cleaning the product with ultrapure water to which the metal antifouling agent is added. Preferably, ultra pure water to which a metal antifouling agent is added is passed through a separation membrane module, and the product is washed with membrane permeated water. |
| priorityDate |
2015-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |