http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018034157-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d97cb748898aa080b013f7f35bc8b434 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C02F1-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J41-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D61-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J41-05 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J47-018 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J39-05 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J39-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J49-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J47-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C02F1-44 |
filingDate | 2017-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_60024dfc25b8da03a232569a3b3c2298 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a2bc4a35de85da17d8f3e3c2261d1a79 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8594d16e33588b021d2357cc51410d1e |
publicationDate | 2018-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2018034157-A |
titleOfInvention | Metal pollution inhibitor, metal pollution prevention film, metal pollution prevention method and product cleaning method |
abstract | An object of the present invention is to reduce the adhesion of trace metals in ultrapure water for product cleaning and suppress metal contamination of the object to be cleaned. A metal contamination inhibitor comprising a polymer having an ion exchange group such as polystyrene sulfonic acid having a molecular weight of 100,000 or more. A trace metal in ultrapure water can be adsorbed by a polymer having an ion exchange group by an ion exchange reaction, thereby suppressing adhesion to a product. A product cleaning method for cleaning products with ultrapure water to which this metal contamination inhibitor is added. Preferably, ultrapure water to which a metal contamination inhibitor is added is passed through the separation membrane module, and the product is washed with membrane permeated water. [Selection] Figure 1 |
priorityDate | 2017-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 31.