| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d97cb748898aa080b013f7f35bc8b434 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F2103-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67057
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F2101-20 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F1-62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F1-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F1-444
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02052
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J39-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C02F1-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J47-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J41-04 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C02F1-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C02F1-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C02F1-62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J41-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J39-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J47-12 |
| filingDate |
2015-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_60024dfc25b8da03a232569a3b3c2298
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a2bc4a35de85da17d8f3e3c2261d1a79
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8594d16e33588b021d2357cc51410d1e |
| publicationDate |
2017-04-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2017064641-A |
| titleOfInvention |
Metal pollution inhibitor, metal pollution prevention method and product cleaning method |
| abstract |
An object of the present invention is to reduce the adhesion of trace metals in ultrapure water for product cleaning and suppress metal contamination of the object to be cleaned. A metal contamination inhibitor comprising a polymer having an ion exchange group such as polystyrene sulfonic acid having a molecular weight of 100,000 or more. A trace metal in ultrapure water can be adsorbed by a polymer having an ion exchange group by an ion exchange reaction, thereby suppressing adhesion to a product. A product cleaning method for cleaning products with ultrapure water to which this metal contamination inhibitor is added. Preferably, ultrapure water to which a metal contamination inhibitor is added is passed through the separation membrane module, and the product is washed with membrane permeated water. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019067799-A |
| priorityDate |
2015-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |