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publicationDate 1992-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber EP-0486047-A2
titleOfInvention Thin film semiconductor device, process for fabricating the same, and silicon film
abstract There is disclosed a semiconductor device comprising a silicon film formed on a substrate having at least a surface formed of an insulative material, the silicon film being heat-treated at a temperature below 600 °C and being partially coated with a silicon oxide film formed by electronic cyclotron resonance plasma CVD.
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