http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-8313
Outgoing Links
| Predicate | Object |
|---|---|
| level | 12^^<http://www.w3.org/2001/XMLSchema#integer> |
| symbol | H01L2224/8313 |
| modified | 2013-01-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| title | Active alignment, i.e. by apparatus steering, e.g. optical alignment using marks or sensors using marks formed on the semiconductor or solid-state body |
| type | http://data.epo.org/linked-data/def/cpc/SubGroup |
| broader | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-83121 |
Incoming Links
Total number of triples: 179.