| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_962adbf7d50e742218f3d536a63df612 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J2203-326
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J2301-304 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-563
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J7-38 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-301
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
2019-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e1e26b37e9f452db64faa5f4b6b3a555
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b7d5c8afa31f7d9cb36d5ef24349c3cd |
| publicationDate |
2019-10-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2019189173-A1 |
| titleOfInvention |
Method for manufacturing semiconductor chip |
| abstract |
A method for manufacturing a semiconductor chip with a first protective film, comprising: attaching a thermosetting resin film to a bump-side first surface of a semiconductor wafer having bumps; forming the first protective film on the first surface of the semiconductor wafer by thermally curing the thermosetting resin film; half cut dicing the semiconductor wafer from the side of the first surface on which the first protective film is formed; and removing a residue of the first protective film at the tops of the bumps and dividing the semiconductor wafer into pieces by irradiating the half cut diced first surface side of the semiconductor wafer with plasma. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021172426-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021172410-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021172424-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114555697-A |
| priorityDate |
2018-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |