| abstract |
The present invention addresses the problem of providing a treatment solution that imparts corrosion-preventing properties to a metal film disposed on a substrate, and exhibits excellent removability of an organic film on a substrate or removability of a dry etching residue or dry ashing residue adhered to a substrate. This treatment solution includes water, a hydrophilic organic solvent, a quaternary ammonium salt, and an inorganic anion, wherein the content of the inorganic anion is 0.001 mass ppt to 1 mass ppm with respect to the total mass of the treatment solution. |