http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020054296-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-26 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32134 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-306 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 |
| filingDate | 2019-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5117df5323734ea44e6f5d31d94aca51 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd95339f6533a61c8e7f94acde46b4a6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a9545efccb44a548b9b6194cde627ba1 |
| publicationDate | 2020-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-2020054296-A1 |
| titleOfInvention | Chemical solution and substrate processing method |
| abstract | The present invention provides a chemical solution having excellent storage stability and defect inhibition capability. The present invention also provides a method for processing a substrate. The chemical solution according to the present invention is used for removing transition metal-containing matter on a substrate, and contains at least one halogen oxoacid selected from the group consisting of halogen oxoacids and salts thereof, and at least one specific anion selected from the group consisting of SO4 2-, NO3 -, PO4 3-, and BO3 3-, wherein in the case where the chemical solution contains a single specific anion, the contained amount of the single specific anion is 5 ppb by mass to 1 mass% with respect to the total mass of the chemical solution, and in the case where the chemical solution contains two or more specific anions, the contained amount of each of the two or more specific anions is 1 mass% or less with respect to the total mass of the chemical solution, and the contained amount of at least one of the two or more specific anions is 5 ppb by mass or more with respect to the total mass of the chemical solution. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021201094-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022030628-A1 |
| priorityDate | 2018-09-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 112.