| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_696ca0ae93d5cf5a686273601361781f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0395
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-322
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2059
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0382
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G8-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 |
| filingDate |
2014-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4f5b5b33259f1c7cdc81d64b3e5956f0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9c10689f3b99e0c023d0871e4182ffbb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4beeec5cb2957b77af06641ebdc1b44f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f853984c85e67773ba6e4556eadbb0f8 |
| publicationDate |
2014-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-2014196425-A1 |
| titleOfInvention |
Resist composition |
| abstract |
This resist composition contains a solvent and a solid component that contains a resist base material. The solid component is contained in an amount of 1-80% by mass and the solvent is contained in an amount of 20-99% by mass in this resist composition. The resist base material contains a compound represented by formula (1) (a ctt form) and a compound represented by formula (3). The ratio of the compound represented by formula (1) (the ctt form) in the resist base material is 65-99% by mass, and the mass ratio of the compound represented by formula (3) to the compound represented by formula (1) (the ctt form) is 0.01-0.53. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102163855-B1 |
| priorityDate |
2013-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |