| abstract |
(57) [Abstract] [Purpose] To provide a radiation-sensitive coating composition having good coating properties and hardly causing foaming. In a radiation-sensitive coating composition containing a base resin, a radiation-sensitive compound, and a solvent, a solvent containing a compound represented by the following general formula is used as a solvent, and a nonionic fluorine-containing surfactant is contained. A radiation-sensitive coating composition characterized in that: Embedded image (In the formula, R 1 , R 2 and R 3 represent a methyl group or an ethyl group which may be substituted with a halogen atom and may be the same or different from each other. R 4 is substituted with a hydrogen atom or a halogen atom. Represents an optionally substituted methyl group or ethyl group.) |