http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2498133-A2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40 |
| filingDate | 2012-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_84d9f1f50907cdfea6c493745594712a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c944a2ea1dd29f4637d0ab9bc5ac415f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_26243fca5206ac74014b7b6aa5eaeb7a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a16a1ec5610c617d225a47ab06e8a3cf http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_52fde7a60a028c340561b023e6600ee6 |
| publicationDate | 2012-09-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | EP-2498133-A2 |
| titleOfInvention | Resin pattern, method for producing the pattern, method for producing MEMS structure, method for manufacturing semiconductor device, and method for producing plated pattern |
| abstract | There is provided a method for producing a resin pattern, and the method includes at least the steps (1) to (7) in this order; (1) a coating step of coating a photosensitive resin composition on a substrate; (2) a solvent removal step of removing the solvent from the applied photosensitive resin composition; (3) an exposure step of patternwise exposing the photosensitive resin composition from which the solvent has been removed, to an active radiation; (4) a development step of developing the exposed photosensitive resin composition using an aqueous developer liquid; (5) an overcoating step of providing an overcoat layer on the developed photosensitive resin composition; (6) a heat-treating step of heat-treating the photosensitive resin composition on which the overcoat layer has been provided; and (7) a removal step of removing the overcoat layer. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016221678-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014074893-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I618983-B |
| priorityDate | 2011-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 700.