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publicationDate 2014-04-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-8696929-B2
titleOfInvention Polishing slurry and polishing method
abstract A polishing slurry including an oxidant, a metal oxide dissolver, a metal inhibitor and water and having a pH from 2 to 5. The polishing slurry having a high metal-polishing rate, reducing etching rate and polishing friction, results in the production, with high productivity, of semiconductor devices reduced in dishing and erosion in metal wiring.
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