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publicationDate 2002-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2002134442-A
titleOfInvention Polishing liquid for metal and polishing method
abstract PROBLEM TO BE SOLVED: To provide a metal polishing liquid having a high productivity and a low dishing and erosion due to a high metal polishing rate and a low etching rate. The present invention provides a metal polishing slurry having excellent electrical characteristics and suitable for manufacturing a highly reliable semiconductor device. SOLUTION: The polishing liquid contains a metal oxidizing agent, a metal oxide dissolving agent, a metal anticorrosive, and water, and the metal anticorrosive contains a compound having a pyrimidine skeleton.
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