| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d72711e97d894c55af805c9de2053ab |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate |
2005-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ddc96f00e979c91d4f19d5665f93aa0b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_953fc1255eebb95e564f1a563326bfc2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9de007165de5df3dd07bb7b217462de1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c30e563c3e9ba8596c258870670b1e1e |
| publicationDate |
2006-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2006019746-A |
| titleOfInvention |
Chemical mechanical polishing composition and related methods |
| abstract |
Provided is an aqueous CMP composition capable of obtaining a sufficient metal removal rate without excessive dishing of metal wiring in CMP of non-ferrous metal wiring on a semiconductor wafer. Acrylic acid and methacrylic acid containing an oxidizing agent, a non-ferrous metal inhibitor, a non-ferrous metal complexing agent, a modified cellulose, a copolymer of acrylic acid and methacrylic acid in an amount of 0.01 to 5% by weight and the balance water. A composition wherein the copolymer with the acid has a monomer ratio (acrylic acid: methacrylic acid) in the range of 1:30 to 30: 1 and a molecular weight in the range of 1K to 1000K. [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009128430-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8734204-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014049633-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019537245-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019537244-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019537246-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5176078-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010512657-A |
| priorityDate |
2004-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |