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filingDate 2004-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2007-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-7183212-B2
titleOfInvention Polishing method, metallization fabrication method, method for manufacturing semiconductor device and semiconductor device
abstract Described is a polishing technique adapted for multilevel metallization of an electronic circuit device, which comprises polishing a metal film with a polishing liquid containing an oxidizing substance, a phosphoric acid and a protection-layer forming agent. The present invention makes it possible to polishing a metal film at a high removal rate while suppressing occurrence of scratches, delamination, dishing or erosion.
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