| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 |
| filingDate |
2005-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2008-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5e0478af9f1bf4a8cbc30b08d0727fe8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7424b1279ae2de689ae4760274958a79
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_25525fb9b80ad643210228173ede3b13
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bbcda31ad1239f86c95da2e9d7192c5e |
| publicationDate |
2008-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7442646-B2 |
| titleOfInvention |
Slurry, chemical mechanical polishing method using the slurry, and method of forming metal wiring using the slurry |
| abstract |
A slurry, chemical mechanical polishing (CMP) method using the slurry, and method of forming metal wiring using the slurry. The slurry may include a polishing agent, an oxidant, and at least one defect inhibitor to protect the metal film. The CMP method and method of forming metal wiring may employ one or two slurries with at least one of the slurries including at least one defect inhibitor. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012276819-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012276742-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8586481-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8790160-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011294293-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8309468-B1 |
| priorityDate |
2004-08-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |