| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_23083851c95ccdaf973a4245a057d25c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b76da7b9882c7f269e2236fe43a24d9c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1aa3ae4588ff02363043f2c2c552bbf0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b5b24382cd944c414e1176c8c5ad6f7d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-231
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-066
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-8828 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 |
| filingDate |
2011-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f27f5e52084ec16dd945689f8c598a47
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_63f3f983de0fd99a68c507f32b841e02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9f4843a6c606bacbb37355d4fe798c86
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6aa1b1dce1a54a978c385911f1f4f365 |
| publicationDate |
2012-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2012276742-A1 |
| titleOfInvention |
Chemical Mechanical Polishing Composition and Method For Polishing Germanium-Antimony-Tellurium Alloys |
| abstract |
A method for chemical mechanical polishing of a substrate comprising a germanium-antimony-tellurium chalcogenide phase change alloy (GST) using a chemical mechanical polishing composition consisting essentially of, as initial components: water; an abrasive; a material selected from ethylene diamine tetra acetic acid and salts thereof; and an oxidizing agent; wherein the chemical mechanical polishing composition facilitates a high GST removal rate with low defectivity. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8790160-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9816010-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012276819-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114605922-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014322913-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014251950-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9238755-B2 |
| priorityDate |
2011-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |