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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321
filingDate 2000-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2001-04-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2001-04-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-6214098-B1
titleOfInvention Chemical-mechanical polishing slurry
abstract One embodiment of the present invention includes a chemical-mechanical polishing (CMP) slurry. The slurry is comprised of one or more ferrocenium salts that is or are reduced, during use, to ferrocene. The slurry also includes an abrasive and a concentration of hydronium ions effective to impart a pH of less than 7.
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