| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1409 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B44C1-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate |
2003-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1f04cb5f660647d7e8031ae069ced384 |
| publicationDate |
2004-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20040041041-A |
| titleOfInvention |
Metal abrasive composition and polishing method |
| abstract |
A metal abrasive composition is provided which can polish metal wiring at high speed and control its etching rate in the manufacture of semiconductor devices. The metal abrasive composition comprises chelated resin particles having at least one functional group selected from the group consisting of (a) aminocarboxylic acid groups, aminophosphonic acid groups and iminodiacetic acid groups, (b) inorganic particles, and (c) carboxylic acid groups, Surfactants having at least one functional group selected from the group consisting of sulfonic acid groups and phosphoric acid groups. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100583533-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7442646-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100672940-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170033329-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100772925-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101278666-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101279964-B1 |
| priorityDate |
2002-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |