| abstract |
The electrodes of these pressure or differential pressure sensors are formed using a technique other than silk-screen printing or sputtering: The pressure sensor ( 10 ) has a substrate ( 1 ) and a first major surface ( 11 ), a second major surface ( 12 ) and a circumferential surface ( 13 . A plate-shaped electrode ( 14 ) of electrically conductive material is secured in a recess ( 15 ) in the major surface ( 11 ) in a high-pressure-resistant and high-vacuum-tight manner by a joining material ( 16 ). A through connection ( 17 ) is provided from the electrode ( 14 ) through the substrate ( 1 ) to the major surface ( 12 ) or the circumferential surface ( 13 ). A diaphragm ( 2 ) of ceramic, glass, or single-crystal material is attached to the substrate ( 1 ) outside the recess ( 15 ) along a joint ( 18 ) by a joining material ( 26 ), and forms itself a further electrode or is covered, on a surface facing the electrode ( 14 ), with a further electrode ( 24 ) which is contacted through the joint ( 18 ). Substrate and diaphragm consist of a ceramic, glass, or single-crystal material. Respective differential pressure sensors have either a common central diaphragm and two substrates or a common substrate and two diaphragms. |