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publicationDate 2015-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-9103738-B2
titleOfInvention Capacitive pressure sensor with intrinsic temperature compensation
abstract Pressure sensors and their methods of use are described. In one embodiment, a pressure sensor includes a probe body and a capacitive sensor disposed at a distal end of the probe body. The capacitive sensor produces a sensing capacitance. The pressure sensor also includes a shunt capacitance. In the described pressure sensor, a change in the sensing capacitance due to dimensional changes associated with a temperature change is offset by a corresponding change in the shunt capacitance.
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