| abstract |
A capacitance pressure sensor includes a pressure diaphragm, an acceleration diaphragm, and a support member. The pressure diaphragm and acceleration diaphragm each include electrodes on surfaces that face each other, thereby forming a pressure sensitive capacitor. The pressure sensitive capacitor is coupled to the support member, which is in turn directly coupled to a base plate. The structure of the pressure sensor is simplified structure in that it includes no additional stress isolation components. |