http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005034527-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L9-0075 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L9-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L9-12 |
| filingDate | 2004-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_28132774527bb687c0e7cd44dd35971e |
| publicationDate | 2005-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2005034527-A1 |
| titleOfInvention | Electrical capacitance sapphire diaphragm pressure sensor and a method of fabricating the same |
| abstract | There is provided a highly accurate electrical capacitance diaphragm pressure sensor capable of reducing temperature drift that arises when a pressure-travel coefficient changes with temperature variations of a fluid whose pressure is sensed. A sapphire diaphragm pressure sensor, in which sapphire diaphragms are arranged in opposing relation, comprises a pressure sensing element ( 10, 30 ) having a pressure receiving part ( 10 A, 30 A) with a deposition electrode formed on each of the opposing faces of sapphire diaphragms which are provided in opposing relation to each other and a securing part with a metal deposited on a part of each of the surfaces of the sapphire diaphragms, and further comprises a metal base ( 11, 31 ) for securing the pressure sensing element at the securing part of the pressure sensing element, a conductive sealing agent ( 13, 33 ) for sealing a gap between the securing part on which a metal is deposited and said metal base, and a nickel protective layer ( 14, 34 ) for protecting at least said conductive sealing agent from a medium whose pressure is to be measured. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7536915-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104977122-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008058406-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7591186-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008110269-A1 |
| priorityDate | 2003-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 33.