| abstract |
Introduced is a method for the production of a diaphragm vacuum measuring cell, wherein on the one side of the diaphragm ( 2 ) at a spacing a first housing plate ( 1 ) is disposed sealing in the margin region with a joining means ( 3 ), and that on the other side of the diaphragm ( 2 ) at a spacing a second housing plate ( 4 ) is disposed sealing in the margin region with a joining means ( 3 ), and that the second housing plate ( 4 ) has an opening at which a connection means ( 5 ) is disposed sealing with joining means ( 3 ) for the connection of the measuring cell ( 8 ) with the medium to be measured, wherein the diaphragm ( 2 ) and the two housing plates ( 1, 4 ) are comprised of a metal oxide. Using an ALD method, the measuring cell is coated in a vacuum chamber ( 64 ), in particular through the opening of the measuring cell, such that the inner wall of the measuring vacuum chamber ( 9 ) and the opening with the connection means ( 5 ) is covered with a protective layer ( 13 ) such that at least the joining means ( 3 ) for the diaphragm ( 2 ) is protectively covered against corrosion. |