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publicationDate 1995-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-5472488-A
titleOfInvention Coating solution for forming glassy layers
abstract There is disclosed doped spin-on glass compositions such as boronoxide doped spin-on glass compositions with a high carbon content and silane adhesion promoter incorporated therein for use as coating layers on substrates such as silicon wafers.
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