| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_965942e7ea8701e32948bb3757b553b1 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-225 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-225 |
| filingDate |
1986-01-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1986-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_464cd01954d1ec73a4ddbcbcc24225a2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5be20fc01c41b4ed4f2ff95c455387f2 |
| publicationDate |
1986-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-4619719-A |
| titleOfInvention |
Process for forming a doped oxide film and composite article |
| abstract |
A process for forming a doped oxide film suitable for doping a semiconductor wafer substrate material and composite article. A silicon tetra-alkoxide is reacted with a limited amount of water to produce a low molecular weight, soluble polyorganosiloxane. The polyorganosiloxane is subsequently admixed with a reactive dopant source to form a soluble metallosiloxane polymer. The metallosiloxane polymer is coated onto a semiconductor wafer substrate material to produce a metallosiloxane-wafer composite article. The composite article is heated to produce an impurity doped semiconductor wafer suitable for electronic applications. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013254934-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5527872-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9076719-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5665845-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9576799-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103387777-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6099647-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106229257-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103387777-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5869362-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5472488-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5994209-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004089026-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10340144-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5028566-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015053480-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4842901-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5585291-A |
| priorityDate |
1982-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |