| abstract |
A spin on glass composition which includes in a solvent as a main component alkoxysilane represented by H n Si(OR) 4-n , where n is 1, 2, or 3 and R is an alkyl group. Water or alcohol is available as a solvent. It is preferable to add the above alkoxysilane with at least any one of a phosphorus compound, boron compound and a germanium compound. It is also preferable to add the above alkoxysilane not only with tetraalkoxysilane Si(OR) 4 , where R is an alkyl group, but also with at least any one of phosphorus compound, boron compound and germanium compound. |