| abstract |
The present invention provides a sulfonium salt represented by the following formula (I): n n n wherein Q 1 , Q 2 and Q 3 each independently represent hydrogen, hydroxy, alkyl having 1 to 6 carbon atoms, or alkoxy having 1 to 6 carbon atoms, but all of Q 1 , Q 2 and Q 3 are not the same; and Q 4 and Q 5 each independently represent perfluoroalkyl having 1 to 8 carbon atoms. n The present invention also provides a chemical amplifying type positive resist composition comprising said sulfonium salt above and a resin which contains a structural unit having a group that is unstable to acid and which is insoluble or slightly soluble by itself in an aqueous alkali, but becomes soluble in the aqueous alkali by an action of acid. n The present invention further provides a polymerization initiator composition comprising said sulfonium salt above and a sensitizer. |