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filingDate 2002-04-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2002-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2002155724-A1
titleOfInvention Dry etching method and apparatus
abstract In dry etching a semiconductor workpiece, a mixture of a carbon-free, fluorine-containing gas and a fluorine-free, carbon-containing gas is used as an etching gas.
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