| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3299
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32082
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32174
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32183
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32568
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32816
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32146
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32981 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate |
2014-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ffd22b8af4aecabc91272f3586193a99 |
| publicationDate |
2018-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-10157729-B2 |
| titleOfInvention |
Soft pulsing |
| abstract |
Systems and methods for soft pulsing are described. One of the systems includes a master radiofrequency (RF) generator for generating a first portion of a master RF signal during a first state and a second portion of the master RF signal during a second state. The master RF signal is a sinusoidal signal. The system further includes an impedance matching circuit coupled to the master RF generator via an RF cable to modify the master RF signal to generate a modified RF signal and a plasma chamber coupled to the impedance matching circuit via an RF transmission line. The plasma chamber is used for generating plasma based on the modified RF signal. A statistical measure of the first portion has a positive or a negative slope. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11600469-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10861708-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11784030-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11756773-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022051878-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11779436-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020090948-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11569070-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11342159-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022254608-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11380520-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11337297-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11728136-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021084742-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11626270-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11600466-B2 |
| priorityDate |
2012-02-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |