Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6c1e49aee5e8b4d0893942406354c171 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-48235 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-48227 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2207-092 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-97 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-81 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-12105 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-94 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-0401 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2225-1058 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-32225 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-32145 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2225-1035 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-48091 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-18162 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-16251 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-3511 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-16237 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-16227 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-13091 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-15 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-181 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-81005 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-15311 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-03 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-0792 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-73267 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-73265 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-00012 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-83 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-81815 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-131 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-568 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-04105 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-04042 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2207-098 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-81191 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L25-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-19 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00301 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5389 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-552 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-561 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-97 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-96 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-007 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00904 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-0023 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L25-105 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-538 |
filingDate |
2015-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b151b58d57e551c8f6e8da42a8336392 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_00d0fd93979d5ea92f5ad1b12e216e0a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e60ec9d4c71eae4dc24110cc8ca7b47c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_591bfe9f2c12cd53003e6634203e6ef1 |
publicationDate |
2015-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
TW-201539590-A |
titleOfInvention |
Semiconductor device and method of forming MEMS package |
abstract |
A semiconductor device has a first semiconductor die and a modular interconnect structure adjacent to the first semiconductor die. A glue sealant is deposited over the first semiconductor die and the modular interconnect structure as a reconstituted panel. An interconnect structure is formed over the first semiconductor die and the modular interconnect structure. The active region of the first semiconductor die still lacks the interconnect structure. A second semiconductor die is mounted over the first semiconductor die and positioned with an active surface of the second semiconductor toward an active surface of the first semiconductor die. The reconstruction panel is singulated before or after mounting the second semiconductor die. The first or second semiconductor die comprises a microelectromechanical system (MEMS). The second semiconductor die includes a encapsulant and an interconnect structure formed over the second semiconductor die. Alternatively, the second semiconductor die is mounted to an interposer disposed over the interconnect structure. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11164754-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I725277-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I778381-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I719131-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I714913-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I724495-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I754839-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I656614-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I713174-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10950593-B2 |
priorityDate |
2014-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |