http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S6184379-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f4a8faea375370b67c9d71e67db32bcd |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-342 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-511 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-48 |
| filingDate | 1984-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f03c1d4db3afc7794d44d6396bb21206 |
| publicationDate | 1986-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-S6184379-A |
| titleOfInvention | Production of high-hardness boron nitride film |
| abstract | PURPOSE:To produce efficiently a high-hardness BN film on the surface of a base body by installing the base body in a reaction chamber, introducing a gas for forming BN into the chamber, generating plasma and projecting laser light thereby accelerating the bond between B and N. CONSTITUTION:An N-contg. gas such as N2 is introduced through the 1st introducing pipe 4 into the reaction chamber 1 in which a magnetic field is applied by a coil 2 for an electromagnet. A microwave is introduced at the same instant through a waveguide 3 into the chamber to generate the plasma. A voltage is impressed to the plasma by an ion accelerating electrode 13 consisting of an earth electrode 14 and a bias electrode 15 to form an ion beam in a deposition chamber 5. Said beam is irradiated to the base body 7 on a sample base 6. A B-contg. gas such as B2H6 is ejected toward the body 7 from the 2nd introducing pipe 8 at the same instart to grow the BN in a vapor phase on the body 7. The laser 10 in a 7.5-12mum wavelength region is scanned from a laser light projecting source 9 on the body 7 via an introducing window 11 and a reflecting plate 12. The high-hardness BN film consisting essentially of CBN and WBN is thus formed on the base body 7. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5279869-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S63134662-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-19900437-B4 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5330611-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5232862-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H09180896-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5803974-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5227318-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H08181075-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5264296-A |
| priorityDate | 1984-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559551 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66227 |
Total number of triples: 27.