| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5de41645f886d763d3f73e3d3fc113cf |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31678 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B23-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02293
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02112
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02266
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-318
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-403 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-318
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B23-02 |
| filingDate |
1993-05-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1994-01-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7f6d3a6fcff046327d6cee14baa31e7f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4d850646f803572deb9d36d92db3356a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cabb1cdd25997278a22655eebc46cc44 |
| publicationDate |
1994-01-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-5279869-A |
| titleOfInvention |
Laser deposition of cubic boron nitride films |
| abstract |
Thin films of boron nitride are grown on single crystal silicon substrates using laser deposition techniques. The films are characterized by essentially a single crystal throughout and having a cubic structure which is in epitaxial registry with the underlying silicon substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6153061-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6460074-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6645639-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/AU-2002211682-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6852160-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005233171-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004096707-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6013130-A |
| priorityDate |
1989-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |