| abstract |
(57) [Summary] (Modified)nSOLUTION: It has a repeating unit represented by the formula (1). Polymerized silicone compound or polymerized silicone Compound carboxyl group or carboxyl group and hydroxyl group water Part or all of the elemental atoms are one or more acid labile groups Weight average molecular weight of 1,000 to 5 000 high molecular silicone compound.n (Wherein, Z is a divalent to hexavalent non-aromatic monocyclic or Polycyclic hydrocarbon group or bridged cyclic hydrocarbon group, Z 'is divalent To a hexavalent, linear or branched hydrocarbon group, or Aromatic monocyclic or polycyclic hydrocarbon group or bridged ring It is a formula hydrocarbon group. R 1 Is -OCHR-R '-OH also Is -NHCHR-R A group represented by ’-OH, R Two Is al A kill or alkenyl group, or a non-aromatic monovalent polycyclic ring It represents a formula hydrocarbon group or a bridged cyclic hydrocarbon group. )n[Effect] Sensitive to high energy rays, excellent in sensitivity and resolution Is useful for microfabrication using electron beams or deep ultraviolet rays It is. |