patent/EP-0982628-A2

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0982628-A2

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
filingDate	1999-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0b36d5bfe2e6c486590f546177af97b6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a9b0528a8ae6ad84bf0d1255548c1110 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6ba3d4b81afe3bd34d3a8f0197bfe93b
publicationDate	2000-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	EP-0982628-A2
titleOfInvention	A chemical amplifying type positive resist composition
abstract	A chemical amplifying type positive resist composition,nexcellent in adhesion to a substrate and good in resistnperformances and suitable for exposure using a KrF excimernlaser, ArF excimer laser, or the like, which comprises a resinnhaving a polymerization unit of 2-alkyl-2-adamantyln(meth)acrylate and a polymerization unit of a monomer selectednfrom 3-hydroxy-1-adamantyl (meth)acrylate andn(meth)acrylonitrile, and an acid generator is provided.
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priorityDate	1998-08-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate	Subject
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0915382-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5738975-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-19626003-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0887706-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5474872-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0663616-A2
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID64152 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129309161

Total number of triples: 83.